Ceglio, Natale: search on Z-Library

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1

Demonstration of guided-wave phenomena at extreme-ultraviolet and soft-x-ray wavelengths

Ceglio, Natale M., Hawryluk, A. M., Stearns, D. G., Kuhne, M., Muller, P.

Journal:

Year:

1988

Language:

english

File:

PDF, 402 KB

english, 1988

2

Wavelength considerations in soft-x-ray projection lithography

Hawryluk, Andrew M., Ceglio, Natale M.

Journal:

Year:

1993

Language:

english

File:

PDF, 686 KB

english, 1993

3

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Differential equation method for design of multimirror x-ray projection lithography systems

Wang, Cheng, Shealy, David L., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 605 KB

english, 1992

4

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - A Schwarzschild Microscope To Study The Preheat Of Laser Heated Targets

Benattar, R., Godart, J., Bridoux, F., Cheauvineau, J. P., Marioge, J. P., Dhez, P., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 3.47 MB

english, 1987

5

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Repair of high-performance multilayer coatings

Gaines, David P., Ceglio, Natale M., Vernon, Stephen P., Krumrey, Michael K., Mueller, Peter, Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 364 KB

english, 1992

6

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - X-Ray Laser Cavity Experiments

Ceglio, N. M., Gaines, D. P., Trebes, J., Hawryluk, A. M., Stearns, D. G., Howe, G. L., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 3.47 MB

english, 1987

7

[Progress in Optics] Volume 21 || IV Zone Plate Coded Imaging: Theory and Applications

Ceglio, Natale M.

Year:

1984

Language:

english

File:

PDF, 3.42 MB

english, 1984

8

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Two methods to improve the optical quality of Ni-C multilayer coatings: ion bombardment and optimization of the substrate temperature

Puik, Eric J., van de Ven, S. W., Wolfis, W. J., van Dorssen, Gert E., van der Wiel, Marnix J., Koper, R. J., Zeijlemaker, H., Verhoeven, Jan, Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 386 KB

english, 1992

9

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Soft X-Ray Beamsplitters And Highly Dispersive Multilayer Mirrors For Use As Soft X-Ray Laser Cavity Components

Hawryluk, Andrew M., Ceglio, Natale M., Stearns, Daniel G., Danzmann, K., Kuhne, M., Muller, P., Wende, B., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 2.41 MB

english, 1987

10

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Upgraded facility for multilayer mirror characterization at NIST

Watts, Richard N., Ederer, David L., Deslattes, Jr., Richard D., Lucatorto, Thomas B., Estler, William T., Evans, Christopher J., Vorburger, Theodore V., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 516 KB

english, 1992

11

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Multilayer mirrors for XUV Ge laser wavelengths

Montcalm, Claude, Sullivan, Brian T., Pepin, Henri, Dobrowolski, Jerzy A., Enright, G. D., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 454 KB

english, 1992

12

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Results on Soft X-Ray Amplification by Lithium-Like Ions in Recombining Plasmas

Jaegle, Pierre, Jamelot, Gerard, Carillon, Antoine, Klisnick, Annie, Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 3.15 MB

english, 1987

13

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Fabrication of advanced x-ray optics with magnetron minisource arrays

Jankowski, Alan F., Foreman, R. J., Makowiecki, Daniel M., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 275 KB

english, 1992

14

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Time and Space Resolved Spectroscopy of X-Ray Laser Experiments from 81Å to 220Å

Ceglio, Natale M., Medecki, Hector, Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 7.00 MB

english, 1987

15

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Precision soft x-ray reflectometry of curved multilayer optics

Krumrey, Michael K., Kuehne, Mikhael, Mueller, Peter, Scholze, Frank, Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 428 KB

english, 1992

16

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Recent Developments With Metal-Oxide Multilayered U.V. Mirrors

Vien, Tran Khanh, Delaboudiniere, J. P., Lepetre, Y., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 1.75 MB

english, 1987

17

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Fabrication and characterization of beryllium-based multilayer mirrors for soft x-rays

Ruffner, Judith A., Slaughter, Jon M., Kearney, Patrick A., Falco, Charles M., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 560 KB

english, 1992

18

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Structural characteristics and performances of rf-sputtered Mo/Si and Co/Si multilayers for soft x-ray optics

Boher, Pierre, Houdy, Philippe, Hennet, Louis, Kuehne, Mikhael, Mueller, Peter, Frontier, J. P., Trouslard, P., Senillou, C., Joud, J. C., Ruterana, P., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 1.79 MB

english, 1992

19

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Multilayer Reflectors for the 200 Å Region

Fernandez, Felix E., Falco, Charles M., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 360 KB

english, 1987

20

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Simulation of the growth of Mo/Si multilayers

Boercker, David B., Morgan, W. Lowell, Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 194 KB

english, 1992

21

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Study of Multilayered X-UV Polarizers and Consequence of the Use of Partially Polarized Light on Absolute Reflectivity Measurements

Khandar, A., Dhez, P., Berland, M., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 3.11 MB

english, 1987

22

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Characterization of Pd-B, Ag-B, and Si-B interfaces

Slaughter, Jon M., Kearney, Patrick A., Falco, Charles M., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 545 KB

english, 1992

23

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Multilayer coatings on figured optics

Vernon, Stephen P., Stearns, Daniel G., Rosen, Robert S., Ceglio, Natale M., Gaines, David P., Krumrey, Michael K., Mueller, Peter, Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 370 KB

english, 1992

24

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Characterization Of Multilayer Structures For Soft X-Ray Laser Research

Kuhne, M., Danzmann, K., Muller, P., Wende, B., Ceglio, N. M., Stearns, D. G., Hawryluk, A. M., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 257 KB

english, 1987

25

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Soft x-ray projection lithography system design and cost analysis

Ceglio, Natale M., Hawryluk, Andrew M., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 740 KB

english, 1992

26

SPIE Proceedings [SPIE Micro - DL tentative - San Jose, CA (Friday 1 March 1991)] Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing - Multilayer optics for soft x-ray projection lithography: problems and prospects

Stearns, Daniel G., Ceglio, Natale M., Hawryluk, Andrew M., Rosen, Robert S., Vernon, Stephen P., Peckerar, Martin C.

Year:

1991

Language:

english

File:

PDF, 661 KB

english, 1991

27

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Multilayers for X-Ray Optics: Production by Diode Sputtering and Characterization by Microcleavage Transmission Electron Microscopy

Ziegler, E., Lepetre, Y., Fenske, G., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 8.77 MB

english, 1987

28

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Laboratory X-Ray Lasers: Future Prospects And Goals

Matthews, Dennis L., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 293 KB

english, 1987

29

Radiation hardness of molybdenum silicon multilayers designed for use in a soft-x-ray projection lithography system

Gaines, David P., Spitzer, Ronnie C., Ceglio, Natale M., Krumrey, Michael, Ulm, Gerhard

Journal:

Year:

1993

Language:

english

File:

PDF, 1013 KB

english, 1993

30

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - First Results Obtained On A Magnetron Sputtering Device Designed To Produce High Reflectivity X-UV Mirrors

Vidal, B., Dhez, P., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 3.73 MB

english, 1987

31

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - A CCD X-Ray Detector Performance Model

Bautz, M. W., Berman, G. E., Doty, J. P., Ricker, G. R., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 730 KB

english, 1987

32

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Damage to Multilayer Mirrors in a Hostile Environment

More, R. M., Warren, K. H., Zinamon, Z., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 174 KB

english, 1987

33

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Experimental study of Fe/C multilayer performance: effects of substrate quality and of x-ray irradiation

Ziegler, Eric, Krisch, M., Vasquez, L., Susini, Jean, Boher, Pierre, Houdy, Philippe, Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 533 KB

english, 1992

34

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - High-performance multilayer mirrors for soft x-ray projection lithography

Stearns, Daniel G., Rosen, Robert S., Vernon, Stephen P., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 772 KB

english, 1992

35

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - TEM and X-Ray Analysis of Multilayer Mirrors and Beamsplitters

Stearns, D. G., Ceglio, N. M., Hawryluk, A. M., Stearns, M. B., Petford-Long, A. K., Chang, C -H., Danzmann, K., Kuhne, M., Muller, P., Wende, B., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 5.90 MB

english, 1987

36

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Reflection masks for soft x-ray projection lithography

Hawryluk, Andrew M., Ceglio, Natale M., Phillion, D. W., Gaines, David P., Browning, Raymond, Pease, Roger Fabian W., Stewart, Diane K., Economou, Nicholas P., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 428 KB

english, 1992

37

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Thermal stability of Mo/Si multilayers

Rosen, Robert S., Viliardos, Michael A., Kassner, M. E., Stearns, Daniel G., Vernon, Stephen P., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 544 KB

english, 1992

38

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Design Of X-Ray Optical Systems To Perform In Pulsed, High Flux X-Ray Environments

Kania, Don R., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 272 KB

english, 1987

39

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Structural changes induced by thermal annealing in W/C multilayers

Chao, Benjamin S., Gonzalez-Hernandez, Jesus, Pawlik, D. A., Ovshinsky, Stanford R., Scholhamer, James, Wood, James L., Parker, Kevin, Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 626 KB

english, 1992

40

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Capability Of Kinetic Ellipsometry As An In Situ Control System For Ultra Thin Layers Stacks Growth: Application To The Realization Of Performant Soft X Ray Optics

Houdy, P., Bodart, V., Nevot, L., Corno, D., Pardo, B., Arbaoui, M., Alehyane, N., Barchewitz, R., Lepetre, Y., Ziegler, E., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 1.45 MB

english, 1987

41

Undulator radiation for at-wavelength interferometry of optics for extreme-ultraviolet lithography

Attwood, David, Sommargren, Gary, Beguiristain, Raul, Nguyen, Khanh, Bokor, Jeffrey, Ceglio, Natale, Jackson, Keith, Koike, Masato, Underwood, James

Journal:

Year:

1993

Language:

english

File:

PDF, 1.27 MB

english, 1993

42

Ion Acoustic Wave Propagation near the Ion Cyclotron Frequency

Ceglio, Natale M.

Journal:

Physics of Fluids

Year:

1970

Language:

english

File:

PDF, 506 KB

english, 1970

43

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - X-Ray CCD Cameras: I. Design of Low Noise, High Performance Systems

Doty, J. P., Luppino, G. A., Ricker, G. R., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 395 KB

english, 1987

44

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Calibrations Of A Multichannel Soft X-Ray Spectrometer

Blake, Richard L., Hockaday, Robert G., Grosso, John S., Idzorek, George C., Henke, Burton L., Wood, James L., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 1.41 MB

english, 1987

45

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Characterization of Multilayer Structures for Soft X-ray Dispersion

Gilfrich, J. V., Brown, D. B., Rosen, D., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 278 KB

english, 1987

46

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Boron-based multilayers for soft x-ray optics

Kearney, Patrick A., Slaughter, Jon M., Falco, Charles M., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 415 KB

english, 1992

47

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Measurements on a Proposed Short Wavelength Laser System in Xenon III

Kapteyn, H. C., Murnane, M. M., Falcone, R. W., Kolbe, G., Lee, R. W., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 234 KB

english, 1987

48

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Fabrication and Evaluation of Mo-Si Multilayer Mirrors for Soft X-Rays

Yamamoto, Masaki, Arai, Akira, Watanabe, Masayuki, Namioka, Takeshi, Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 1.07 MB

english, 1987

49

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Low-Z1/low-Z2 multilayer x-ray optical thin films

Biltoft, Peter J., Pombo, Ralph F., Ceglio, Natale M.

Year:

1992

Language:

english

File:

PDF, 366 KB

english, 1992

50

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - X-UV Spectral Analysis Using a Double Flat-Multilayer Monochromator

Marmoret, R., Mosnier-Thoumas, I., Pirocchi, M., Barchewitz, R., Susini, J., Rivoira, R., Philip, R., Ceglio, Natale M., Dhez, Pierre

Year:

1987

Language:

english

File:

PDF, 1.94 MB

english, 1987

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